详情介绍：
此系列产品为微镜阵列，即采用微光机电光束偏转镜组成的镜面整列。适用波长可从深紫外至近红外（DUV to NIR, 193nm~1500nm）。镜面可由256×256个微镜面组成，每个镜面为16um*16um。扫描频率可达1KHz。可用做图形的产生，可编程掩膜板等。

Example of micro mirror array for extended spectral range
● 256 x 256 micro mirrors
● 16 μm x 16 μm mirror pitch
● Frame rate 1 kHz
● Analogue mirror tilting
● Illumination wavelengths : 193 … 1500 nm

Applications
● Pattern projection (real time grey levels)
● Programmable masks
● Structured / programmable illumination

Important Notice

Performance figures, data and any illustrative material provided in this data sheet are typical and must be specifically confirmed in writing by F-tone Networks before they become applicable to any particular order or contract. In accordance with the F-tone Networks policy of continuous improvement specifications may change without notice.

The publication of information in this data sheet does not imply freedom from patent or other protective rights of F-tone Networks or others. Further details are available from any F-tone Networks sales representative.